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Site-Selective Deposition of TiO2 Thin Films Using Self-Assembled Monolayers and Their Dielectric Properties
- Source :
- Key Engineering Materials; September 2002, Vol. 228 Issue: 1 p125-130, 6p
- Publication Year :
- 2002
-
Abstract
- Not Available
Details
- Language :
- English
- ISSN :
- 10139826 and 16629795
- Volume :
- 228
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Key Engineering Materials
- Publication Type :
- Periodical
- Accession number :
- ejs20042687
- Full Text :
- https://doi.org/10.4028/www.scientific.net/KEM.228-229.125