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Sedimentation of Impurity Atoms in InSb Semiconductor under a Strong Gravitational Field

Authors :
Iguchi, Yusuke
Ono, Masao
Okayasu, Satoru
Mashimo, Tsutomu
Source :
Diffusion and Defect Data Part A: Defect and Diffusion Forum; April 2009, Vol. 289 Issue: 1 p319-322, 4p
Publication Year :
2009

Abstract

An atomic-scale graded structure has been formed by sedimentation of substitutional atoms under an ultra-strong gravitational field of 1 million G level in alloys and compounds. In this study, we investigate the sedimentation of impurity atoms in semiconductor materials under a strong gravitational field. High-temperature ultracentrifuge experiments (0.59×106 G, 400°C, 60 hours) have been performed on an InSb single crystal wafer which surface was coated with Ge by means of Physical Vapor Deposition (PVD). It was observed that the penetration depth of diffused Ge atoms under the gravitational field was several times larger than under terrestrial field at the same temperatures.

Details

Language :
English
ISSN :
10120386 and 16629507
Volume :
289
Issue :
1
Database :
Supplemental Index
Journal :
Diffusion and Defect Data Part A: Defect and Diffusion Forum
Publication Type :
Periodical
Accession number :
ejs20066830
Full Text :
https://doi.org/10.4028/www.scientific.net/DDF.289-292.319