Copper Decontamination Ability of Supercritical-CO2/Additives on CVD and Spin-On Porous MSQ Materials

MLA

Daviot, Jerome, et al. “Copper Decontamination Ability of Supercritical-CO2/Additives on CVD and Spin-On Porous MSQ Materials.” Diffusion and Defect Data Part B: Solid State Phenomena, vol. 103, no. 1, Apr. 2005, pp. 327–30. EBSCOhost, https://doi.org/10.4028/www.scientific.net/SSP.103-104.327.

APA

Daviot, J., Perrut, V., Gaillard, F., Millet, C., Danel, A., Broussous, L., & Louis, D. (2005). Copper Decontamination Ability of Supercritical-CO2/Additives on CVD and Spin-On Porous MSQ Materials. Diffusion and Defect Data Part B: Solid State Phenomena, 103(1), 327–330. https://doi.org/10.4028/www.scientific.net/SSP.103-104.327

Chicago

Daviot, Jerome, V. Perrut, F. Gaillard, C. Millet, Adrien Danel, Lucile Broussous, and Didier Louis. 2005. “Copper Decontamination Ability of Supercritical-CO2/Additives on CVD and Spin-On Porous MSQ Materials.” Diffusion and Defect Data Part B: Solid State Phenomena 103 (1): 327–30. doi:10.4028/www.scientific.net/SSP.103-104.327.