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Noncontact Measurement of Surface Resistivity Using a Phi-Type Electrode

Authors :
Sugimoto, T.
Ishii, H.
Higashiyama, Y.
Source :
IEEE Transactions on Industry Applications; November 1974, Vol. 10 Issue: 6 p2192-2197, 6p
Publication Year :
1974

Details

Language :
English
ISSN :
00939994
Volume :
10
Issue :
6
Database :
Supplemental Index
Journal :
IEEE Transactions on Industry Applications
Publication Type :
Periodical
Accession number :
ejs20127374
Full Text :
https://doi.org/10.1109/TIA.2009.2031885