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Polytype Stability of 4H-SiC Seed Crystal on Solution Growth

Authors :
Alexander
Seki, Kazuaki
Kozawa, Shigeta
Yamamoto, Yuji
Ujihara, Toru
Takeda, Yoshikazu
Source :
Materials Science Forum; March 2011, Vol. 679 Issue: 1 p24-27, 4p
Publication Year :
2011

Abstract

We investigated the polytype transition process from 4H-SiC to 6H-SiC during solution growth from the viewpoint of growth mode. The polarity dependence of the dominant grown polytype was similar to those of the sublimation growth and the CVD growth that 4H-SiC relatively grew stably on the C-face. Moreover, the polytype transition occurred during spiral growth. The 6H-SiC expanded to periphery overgrowing on the 4H-SiC. In contrast, there is no sign that 4H-SiC grew on 6H-SiC.

Details

Language :
English
ISSN :
02555476 and 16629752
Volume :
679
Issue :
1
Database :
Supplemental Index
Journal :
Materials Science Forum
Publication Type :
Periodical
Accession number :
ejs23551151
Full Text :
https://doi.org/10.4028/www.scientific.net/MSF.679-680.24