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Growth pressure dependence of neighboring mask interference in densely arrayed narrow-stripe selective MOVPE for integrated photonic devices

Authors :
Sudo, S.
Yokoyama, Y.
Nakazaki, T.
Mori, K.
Kudo, K.
Yamaguchi, M.
Sasaki, T.
Source :
Journal of Crystal Growth; 2000, Vol. 221 Issue: 1 p189-195, 7p
Publication Year :
2000

Details

Language :
English
ISSN :
00220248
Volume :
221
Issue :
1
Database :
Supplemental Index
Journal :
Journal of Crystal Growth
Publication Type :
Periodical
Accession number :
ejs2579321
Full Text :
https://doi.org/10.1016/S0022-0248(00)00684-9