Freeform source optimization for improving litho-performance of warm spots

MLA

Wu, Chun-Wei, et al. “Freeform Source Optimization for Improving Litho-Performance of Warm Spots.” Proceedings of SPIE, vol. 8166, no. 1, Oct. 2011, p. 81663C–81663C–8. EBSCOhost, https://doi.org/10.1117/12.896978.

APA

Wu, C.-W., Liao, C.-C., Shih, C.-L., Chang, C.-H., Hsu, S., Liu, H.-Y., & Li, Z. (2011). Freeform source optimization for improving litho-performance of warm spots. Proceedings of SPIE, 8166(1), 81663C–81663C–8. https://doi.org/10.1117/12.896978

Chicago

Wu, Chun-Wei, Chun-Cheng Liao, Chiang-Lin Shih, Chung-Hsing Chang, Stephen Hsu, Hua-Yu Liu, and Zhipan Li. 2011. “Freeform Source Optimization for Improving Litho-Performance of Warm Spots.” Proceedings of SPIE 8166 (1): 81663C–81663C–8. doi:10.1117/12.896978.