Cite
Piezoelectric inchworm-type probe-approaching stepper
MLA
Fu, Xing, et al. “Piezoelectric Inchworm-Type Probe-Approaching Stepper.” Proceedings of SPIE, vol. 8321, no. 1, Aug. 2011, p. 83210Z–83210Z–6. EBSCOhost, https://doi.org/10.1117/12.903935.
APA
Fu, X., Xiao, W., & Xu, L. (2011). Piezoelectric inchworm-type probe-approaching stepper. Proceedings of SPIE, 8321(1), 83210Z–83210Z–6. https://doi.org/10.1117/12.903935
Chicago
Fu, Xing, Wenlan Xiao, and Linyan Xu. 2011. “Piezoelectric Inchworm-Type Probe-Approaching Stepper.” Proceedings of SPIE 8321 (1): 83210Z–83210Z–6. doi:10.1117/12.903935.