A non-uniform SEM contour sampling technique for OPC model calibration

MLA

Shibahara, T., et al. “A Non-Uniform SEM Contour Sampling Technique for OPC Model Calibration.” Proceedings of SPIE, vol. 8324, no. 1, Mar. 2012, p. 83242Q–83242Q–7. EBSCOhost, https://doi.org/10.1117/12.913957.

APA

Shibahara, T., Oikawa, M., Shindo, H., Sugahara, H., & Hojyo, Y. (2012). A non-uniform SEM contour sampling technique for OPC model calibration. Proceedings of SPIE, 8324(1), 83242Q–83242Q–7. https://doi.org/10.1117/12.913957

Chicago

Shibahara, T., M. Oikawa, H. Shindo, H. Sugahara, and Y. Hojyo. 2012. “A Non-Uniform SEM Contour Sampling Technique for OPC Model Calibration.” Proceedings of SPIE 8324 (1): 83242Q–83242Q–7. doi:10.1117/12.913957.