Specific features induced by the vaporization of solid organometallic compounds used as OMCVD precursors for deposition in the V-C-N chemical system

Details

Language :

English

ISSN :

01519107

Volume :

23

Issue :

5-6

Database :

Supplemental Index

Journal :

Annales de Chimie Science des Matériaux

Publication Type :

Periodical

Accession number :

ejs2849322

Full Text :

https://doi.org/10.1016/S0151-9107(99)80014-2