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Cross shaped pattern on chrome mask for 0.5 m contact hole fabrication
- Source :
- Microelectronic Engineering; 1994, Vol. 23 Issue: 1 p175-175, 1p
- Publication Year :
- 1994
Details
- Language :
- English
- ISSN :
- 01679317
- Volume :
- 23
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Microelectronic Engineering
- Publication Type :
- Periodical
- Accession number :
- ejs2930476
- Full Text :
- https://doi.org/10.1016/0167-9317(94)90131-7