Back to Search
Start Over
Surface Roughness Reduction and Diffraction Efficiency Optimisation for E-beam Written Phase Masks
- Source :
- Microelectronic Engineering; 1998, Vol. 41 Issue: 1 p199-202, 4p
- Publication Year :
- 1998
Details
- Language :
- English
- ISSN :
- 01679317
- Volume :
- 41
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Microelectronic Engineering
- Publication Type :
- Periodical
- Accession number :
- ejs2931534
- Full Text :
- https://doi.org/10.1016/S0167-9317(98)00045-8