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Structure and electrical property of platinum film biased dc-sputter-deposited on silicon

Authors :
Kojima, D.
Makihara, K.
Shi, J.
Hashimoto, M.
Source :
Applied Surface Science; January 2001, Vol. 169 Issue: 1 p320-324, 5p
Publication Year :
2001

Details

Language :
English
ISSN :
01694332
Volume :
169
Issue :
1
Database :
Supplemental Index
Journal :
Applied Surface Science
Publication Type :
Periodical
Accession number :
ejs2991356
Full Text :
https://doi.org/10.1016/S0169-4332(00)00662-0