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Energy and mass spectra of ions in triode ion plating of Ti(C,N) coatings
- Source :
- Surface and Coatings Technology; November 1995, Vol. 77 Issue: 8-9 p135-141, 7p
- Publication Year :
- 1995
-
Abstract
- Ti(C,N) coatings were deposited by triode ion plating in a mixture of argon, acetylene and nitrogen. The acetylene inlet was positioned at two different locations relative to the dense plasma. The energy distribution of selected ions during Ti(CxN1-x) deposition was measured by an energy resolved mass spectrometer. The mass spectra showed wide energy distributions of Ti ions, and energy distributions of other ionized molecules, clusters and radicals. A higher probability of acetylene dissociation with the acetylene inlet directed into the plasma was observed. Preferred orientation, lattice parameters and stress for the Ti(C,N) coatings were measured by X-ray diffraction. The measured compressive stress ranged from 8 to 13 GPa, the microhardness from 0.24 to 0.27 GPa. The scratch-test revealed an adhesion comparable to that of TiN coatings.
Details
- Language :
- English
- ISSN :
- 02578972
- Volume :
- 77
- Issue :
- 8-9
- Database :
- Supplemental Index
- Journal :
- Surface and Coatings Technology
- Publication Type :
- Periodical
- Accession number :
- ejs3031769
- Full Text :
- https://doi.org/10.1016/0257-8972(95)02569-3