Back to Search
Start Over
All-silicon microforce sensor for bio applications
- Source :
- Proceedings of SPIE; May 2013, Vol. 8763 Issue: 1 p87630Y-87630Y-6, 788677p
- Publication Year :
- 2013
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 8763
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs31094314
- Full Text :
- https://doi.org/10.1117/12.2017368