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Chemical mechanical planarization of amorphous Ge2Sb2Te5using KClO4as oxidizer in acidic slurry
- Source :
- Proceedings of SPIE; January 2013, Vol. 8782 Issue: 1 p87820Y-87820Y-6, 790387p
- Publication Year :
- 2013
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 8782
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs31095044
- Full Text :
- https://doi.org/10.1117/12.2015253