Back to Search
Start Over
Simulations of spatial DSA morphology, DSA-aware assist features and block copolymer-homopolymer blends
- Source :
- Proceedings of SPIE; March 2014, Vol. 9049 Issue: 1 p904908-904908-10
- Publication Year :
- 2014
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 9049
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs32893142
- Full Text :
- https://doi.org/10.1117/12.2046082