Back to Search
Start Over
On-line surface inspection using cylindrical lens–based spectral domain low-coherence interferometry
- Source :
- Applied Optics; August 2014, Vol. 53 Issue: 24 p5510-5516, 7p
- Publication Year :
- 2014
-
Abstract
- We present a spectral domain low-coherence interferometry (SD-LCI) method that is effective for applications in on-line surface inspection because it can obtain a surface profile in a single shot. It has an advantage over existing spectral interferometry techniques by using cylindrical lenses as the objective lenses in a Michelson interferometric configuration to enable the measurement of long profiles. Combined with a modern high-speed CCD camera, general-purpose graphics processing unit, and multicore processors computing technology, fast measurement can be achieved. By translating the tested sample during the measurement procedure, real-time surface inspection was implemented, which is proved by the large-scale 3D surface measurement in this paper. ZEMAX software is used to simulate the SD-LCI system and analyze the alignment errors. Two step height surfaces were measured, and the captured interferograms were analyzed using a fast Fourier transform algorithm. Both 2D profile results and 3D surface maps closely align with the calibrated specifications given by the manufacturer.
Details
- Language :
- English
- ISSN :
- 1559128X and 21553165
- Volume :
- 53
- Issue :
- 24
- Database :
- Supplemental Index
- Journal :
- Applied Optics
- Publication Type :
- Periodical
- Accession number :
- ejs33559677