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A method for compensating the polarization aberration of projection optics in immersion lithography
- Source :
- Proceedings of SPIE; August 2014, Vol. 9283 Issue: 1 p928309-928309-9
- Publication Year :
- 2014
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 9283
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs34043197
- Full Text :
- https://doi.org/10.1117/12.2069711