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Optical study of porous silicon buried waveguides fabricated from p-type silicon

Authors :
Charrier, J.
Lupi, C.
Haji, L.
Boisrobert, C.
Source :
Materials Science in Semiconductor Processing; 2000, Vol. 3 Issue: 5 p357-361, 5p
Publication Year :
2000

Details

Language :
English
ISSN :
13698001
Volume :
3
Issue :
5
Database :
Supplemental Index
Journal :
Materials Science in Semiconductor Processing
Publication Type :
Periodical
Accession number :
ejs3599225
Full Text :
https://doi.org/10.1016/S1369-8001(00)00056-1