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Optical study of porous silicon buried waveguides fabricated from p-type silicon
- Source :
- Materials Science in Semiconductor Processing; 2000, Vol. 3 Issue: 5 p357-361, 5p
- Publication Year :
- 2000
Details
- Language :
- English
- ISSN :
- 13698001
- Volume :
- 3
- Issue :
- 5
- Database :
- Supplemental Index
- Journal :
- Materials Science in Semiconductor Processing
- Publication Type :
- Periodical
- Accession number :
- ejs3599225
- Full Text :
- https://doi.org/10.1016/S1369-8001(00)00056-1