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Investigation of contamination of thin-film aluminum filters by MMH-NTO plumes exposed to UV radiation

Authors :
Fineschi, Silvano
Fennelly, Judy
Gupta, Vaibhav
Wieman, Seth
Didkovsky, Leonid
Haiges, Ralf
Yao, Yuhan
Wu, Wei
Gruntman, Mike
Erwin, Dan
Source :
Proceedings of SPIE; September 2015, Vol. 9604 Issue: 1 p960408-960408-14
Publication Year :
2015

Details

Language :
English
ISSN :
0277786X
Volume :
9604
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs37384101
Full Text :
https://doi.org/10.1117/12.2186812