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Systematic error analysis for 3D nanoprofiler tracing normal vector
- Source :
- Proceedings of SPIE; October 2015, Vol. 9633 Issue: 1 p96331B-96331B-7, 866987p
- Publication Year :
- 2015
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 9633
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs37624646
- Full Text :
- https://doi.org/10.1117/12.2196021