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Fabrication and characterization of high-K dielectric integrated silicon nanowire sensor for DNA sensing application (Conference Presentation)
- Source :
- Proceedings of SPIE; September 2016, Vol. 9930 Issue: 1 p99300Q-99300Q-1, 893702p
- Publication Year :
- 2016
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 9930
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs40538502
- Full Text :
- https://doi.org/10.1117/12.2237350