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Soft X-ray microscope with nanometer spatial resolution and its applications
- Source :
- Proceedings of SPIE; December 2016, Vol. 10159 Issue: 1 p101590W-101590W-8, 914319p
- Publication Year :
- 2016
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10159
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs40822243
- Full Text :
- https://doi.org/10.1117/12.2259877