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Proposal of a peristaltic micropump using dielectric elastomer actuators fabricated by MEMS technology
- Source :
- Proceedings of SPIE; April 2017, Vol. 10163 Issue: 1 p101631L-101631L-6, 914686p
- Publication Year :
- 2017
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10163
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs42710955
- Full Text :
- https://doi.org/10.1117/12.2258575