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Prediction of High-Density and High-Mobility Two-Dimensional Electron Gas at AlxGa1-xN/4H-SiC Interface
- Source :
- Materials Science Forum; May 2017, Vol. 897 Issue: 1 p719-722, 4p
- Publication Year :
- 2017
-
Abstract
- This work presents theoretical demonstration of two-dimensional electron gas (2DEG) at the interface between Al<subscript>0.2</subscript>Ga<subscript>0.8</subscript>N and 4H-SiC, based on the self-consistent solution of Schrödinger–Poisson equations. High sheet carrier density of 1.1×10<superscript>13 </superscript>cm<superscript>-2</superscript> was obtained in the Al<subscript>0.2</subscript>Ga<subscript>0.8</subscript>N/4H-SiC heterostructure, which is comparable to the electron concentration in Al<subscript>0.2</subscript>Ga<subscript>0.8</subscript>N/GaN heterostructure. The current–voltage characteristics of a high-electron-mobility transistor (HEMT), based on the Al<subscript>0.2</subscript>Ga<subscript>0.8</subscript>N/4H-SiC heterostructure, show a saturated drain current of 1.5 A/mm at the gate voltage of 2 V and the transconductance of 194 mS/mm at -3.95 V. In spite of interface-roughness scattering and phonon scattering, the 2DEG at the Al<subscript>x</subscript>Ga<subscript>1-x</subscript>N/4H-SiC interface exhibits high electron mobility values of 3365 cm<superscript>2</superscript>/ (V·s) at 77K and 1120 cm<superscript>2</superscript>/ (V·s) at 300K. These results indicate that Al<subscript>x</subscript>Ga<subscript>1-x</subscript>N/4H-SiC heterostructure can significantly improve the mobility of SiC based power switching devices.
Details
- Language :
- English
- ISSN :
- 02555476 and 16629752
- Volume :
- 897
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Materials Science Forum
- Publication Type :
- Periodical
- Accession number :
- ejs42853095
- Full Text :
- https://doi.org/10.4028/www.scientific.net/MSF.897.719