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Pillars fabrication by DSA lithography: material and process options
- Source :
- Proceedings of SPIE; March 2018, Vol. 10586 Issue: 1 p105860Q-105860Q-7, 952748p
- Publication Year :
- 2018
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10586
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs45627804
- Full Text :
- https://doi.org/10.1117/12.2297414