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Research on manufacturing technology of high-precision aerostatic rotary tables based on LODTM
- Source :
- Proceedings of SPIE; December 2018, Vol. 10849 Issue: 1 p108491E-108491E-10, 10740620p
- Publication Year :
- 2018
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10849
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs47546543
- Full Text :
- https://doi.org/10.1117/12.2505666