Back to Search
Start Over
Study on surface roughness change of modified silicon carbide in ion beam polishing
- Source :
- Proceedings of SPIE; July 2019, Vol. 11063 Issue: 1 p110631F-110631F-11, 10952481p
- Publication Year :
- 2019
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11063
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs51674676
- Full Text :
- https://doi.org/10.1117/12.2540720