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An absolute measurement method of time-grating angular displacement sensor
- Source :
- Proceedings of SPIE; November 2019, Vol. 11343 Issue: 1 p113430D-113430D-6, 1020877p
- Publication Year :
- 2019
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11343
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs51723253
- Full Text :
- https://doi.org/10.1117/12.2547184