Interfaces Formed by ALD Metal Oxide Growth on Metal Layers

MLA

Aussen, Stephan, et al. “Interfaces Formed by ALD Metal Oxide Growth on Metal Layers.” ECS Transactions, vol. 80, no. 3, Aug. 2017, pp. 87–95. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edo&AN=ejs52640455&authtype=sso&custid=ns315887.

APA

Aussen, S., Hardtdegen, A., Skaja, K., & Hoffmann, S. (2017). Interfaces Formed by ALD Metal Oxide Growth on Metal Layers. ECS Transactions, 80(3), 87–95.

Chicago

Aussen, Stephan, Alexander Hardtdegen, Katharina Skaja, and Susanne Hoffmann. 2017. “Interfaces Formed by ALD Metal Oxide Growth on Metal Layers.” ECS Transactions 80 (3): 87–95. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edo&AN=ejs52640455&authtype=sso&custid=ns315887.