On the Verification of EEDFs in Plasmas with Silane using Optical Emission Spectroscopy

MLA

Boogaard, Arjen, et al. “On the Verification of EEDFs in Plasmas with Silane Using Optical Emission Spectroscopy.” ECS Transactions, vol. 6, no. 1, Apr. 2007, pp. 259–70. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edo&AN=ejs52655238&authtype=sso&custid=ns315887.

APA

Boogaard, A., Kovalgin, A., Brunets, I., Holleman, J., and, W., & Schmitz, J. (2007). On the Verification of EEDFs in Plasmas with Silane using Optical Emission Spectroscopy. ECS Transactions, 6(1), 259–270.

Chicago

Boogaard, Arjen, Alexey Kovalgin, Ihor Brunets, Jisk Holleman, Wolters and, and Jurriaan Schmitz. 2007. “On the Verification of EEDFs in Plasmas with Silane Using Optical Emission Spectroscopy.” ECS Transactions 6 (1): 259–70. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edo&AN=ejs52655238&authtype=sso&custid=ns315887.