EUV and particle generations from laser-irradiated solid- and low-density targets

Properties of extreme ultraviolet (EUV) and particle emissions from laser-produced tin (Sn) plasma were experimentally investigated for use in industrial applications. Dependence of EUV emission on the initial thickness of Sn overcoat on a plastic sphere was studied to clarify the minimum mass needed to keep sufficient conversion to EUV and minimize plasma debris. EUV emission from low-density targets showed narrower spectra peaked at 13.5 nm, attributed to reduction of satellite line emissions in the spectrum foot and opacity broadening at the peak. It is shown that not only the EUV generation but also ion spectra are significantly affected by the Sn coat thicknesses.