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Enhanced Performance of ZnO/SiO2/Al2O3Surface Acoustic Wave Devices with Embedded Electrodes
- Source :
- ACS Applied Materials & Interfaces; September 2020, Vol. 12 Issue: 37 p42378-42385, 8p
- Publication Year :
- 2020
-
Abstract
- With the advent of the 5G era, surface acoustic wave (SAW) devices with a larger bandwidth and better temperature stability are strongly required, meanwhile the dimensions of devices are continuously scaling down. In this work, a new layout of ZnO/SiO2/Al2O3SAW devices with embedded electrodes was developed, and with the help of the finite element method (FEM), the propagation characteristics were simulated. Through adopting embedded electrodes, a large electromechanical coupling coefficient (K2) of 6.6% for the Rayleigh mode can be achieved (5 times larger than that of the conventional ZnO/Al2O3structure), feasible for wideband SAW devices, and a low acoustic velocity (Vp) of 2960 m/s is exhibited simultaneously, which benefits the miniaturization of SAW devices. The dramatic enhancement of K2is mainly attributed to the more efficient excitation of SAW in piezoelectric films. Furthermore, a SiO2overlay is added on the top of the structure to gain an excellent zero temperature coefficient of frequency (TCF). Experimentally, we successfully fabricated SAW one-port resonators based on the proposed structure and good characteristics of high K2, low Vp, and small TCF as simulated were confirmed. Our results show that the proposed structure provides a viable route to design SAW devices with a large bandwidth, small size, and robust temperature compensation for practical use.
Details
- Language :
- English
- ISSN :
- 19448244
- Volume :
- 12
- Issue :
- 37
- Database :
- Supplemental Index
- Journal :
- ACS Applied Materials & Interfaces
- Publication Type :
- Periodical
- Accession number :
- ejs54050032
- Full Text :
- https://doi.org/10.1021/acsami.0c12055