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An innovative chemical mechanical polishing slurry for sesquioxides crystal (Yb:LuScO3)
- Source :
- Proceedings of SPIE; October 2020, Vol. 11548 Issue: 1 p115481F-115481F-7, 1039337p
- Publication Year :
- 2020
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11548
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs54676561
- Full Text :
- https://doi.org/10.1117/12.2573554