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Study on dwell time compensation method of atmospheric pressure plasma processing
- Source :
- Proceedings of SPIE; October 2020, Vol. 11548 Issue: 1 p115481L-115481L-6, 1039336p
- Publication Year :
- 2020
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11548
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs54676567
- Full Text :
- https://doi.org/10.1117/12.2573825