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Design of extreme ultraviolet quarter wave plate based on linearly chirped multilayer mirror
- Source :
- Proceedings of SPIE; December 2020, Vol. 11608 Issue: 1 p116080E-116080E-5, 1044726p
- Publication Year :
- 2020
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11608
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs55059491
- Full Text :
- https://doi.org/10.1117/12.2587570