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High speed antimony-based superlattice photodetectors transferred on sapphire
- Source :
- Applied Physics Express (APEX); November 2019, Vol. 12 Issue: 11 p116502-116502, 1p
- Publication Year :
- 2019
-
Abstract
- We report the substrate transfer of InAs/GaSb/AlSb based type-II superlattice (T2SL) e-SWIR photodetector from native GaSb substrates to low-loss sapphire substrate in order to enhance the frequency response of the device. We have demonstrated the damage-free transfer of T2SL-based thin-films to sapphire substrate using top-down processing and a chemical epilayer release technique. After transfer the ?3 dB cut-off frequency increased from 6.4 GHz to 17.2 GHz, for 8 ?m diameter circular mesas under ?15 V applied bias. We also investigated the cut-off frequency verses applied bias and lateral scaling to assess the limitations for even higher frequency performance.
Details
- Language :
- English
- ISSN :
- 18820778 and 18820786
- Volume :
- 12
- Issue :
- 11
- Database :
- Supplemental Index
- Journal :
- Applied Physics Express (APEX)
- Publication Type :
- Periodical
- Accession number :
- ejs55911335
- Full Text :
- https://doi.org/10.7567/1882-0786/ab4a8e