The application of a new stochastic search algorithm “Adam” in inverse lithography technology (ILT) in critical recording head fabrication process

Details

Language :

English

ISSN :

0277786X

Volume :

11613

Issue :

1

Database :

Supplemental Index

Journal :

Proceedings of SPIE

Publication Type :

Periodical

Accession number :

ejs56046658

Full Text :

https://doi.org/10.1117/12.2583508