Spark assisted chemical engraving (SACE) in microfactory

MLA

Wüthrich, R., et al. “Spark Assisted Chemical Engraving (SACE) in Microfactory.” Journal of Micromechanics and Microengineering, vol. 15, no. 10, Oct. 2005, pp. S276–80. EBSCOhost, https://doi.org/10.1088/0960-1317/15/10/S04.

APA

Wüthrich, R., Fujisaki, K., Couthy, P., Hof, L. A., & Bleuler, H. (2005). Spark assisted chemical engraving (SACE) in microfactory. Journal of Micromechanics and Microengineering, 15(10), S276–S280. https://doi.org/10.1088/0960-1317/15/10/S04

Chicago

Wüthrich, R, K Fujisaki, Ph Couthy, L A Hof, and H Bleuler. 2005. “Spark Assisted Chemical Engraving (SACE) in Microfactory.” Journal of Micromechanics and Microengineering 15 (10): S276–80. doi:10.1088/0960-1317/15/10/S04.