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Vectorial 3D modeling of coherence scanning interferometry

Authors :
Bodermann, Bernd
Frenner, Karsten
Barnes, Bryan M.
Pahl, Tobias
Hagemeier, Sebastian
Künne, Marco
Danzglock, Corvin
Reinhold, Nils
Schulze, Ricky
Siebert, Markus
Lehmann, Peter
Source :
Proceedings of SPIE; June 2021, Vol. 11783 Issue: 1 p117830G-117830G-11, 11665182p
Publication Year :
2021

Details

Language :
English
ISSN :
0277786X
Volume :
11783
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs56966313
Full Text :
https://doi.org/10.1117/12.2592617