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The effect of deposition process parameters on thin film coatings for the Athena X-ray optics
- Source :
- Proceedings of SPIE; August 2021, Vol. 11822 Issue: 1 p118220B-118220B-10, 11703791p
- Publication Year :
- 2021
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11822
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs58062982
- Full Text :
- https://doi.org/10.1117/12.2594422