Overlay stability control in IBO measurement using rAIM target

MLA

Robinson, John C., et al. “Overlay Stability Control in IBO Measurement Using RAIM Target.” Proceedings of SPIE, vol. 12053, no. 1, May 2022, p. 120530E–120530E–8. EBSCOhost, https://doi.org/10.1117/12.2608053.

APA

Robinson, J. C., Sendelbach, M. J., Park, N., Lee, D., Liu, L., Zhou, X., Su, H., Choi, D., Zhou, W., Spielberg, H., Megged, E., Dror, C., Shaphirov, D., Liu, Z., Ghinovker, M., Lee, D., Yeon, H., Kim, H., Park, S., … Lee, S. (2022). Overlay stability control in IBO measurement using rAIM target. Proceedings of SPIE, 12053(1), 120530E–120530E–8. https://doi.org/10.1117/12.2608053

Chicago

Robinson, John C., Matthew J. Sendelbach, Nahee Park, Dohwa Lee, Liu Liu, Xuefei Zhou, Hongpeng Su, et al. 2022. “Overlay Stability Control in IBO Measurement Using RAIM Target.” Proceedings of SPIE 12053 (1): 120530E–120530E–8. doi:10.1117/12.2608053.