Advanced CD uniformity correction using radial basis function (RBF) models

MLA

Robinson, John C., et al. “Advanced CD Uniformity Correction Using Radial Basis Function (RBF) Models.” Proceedings of SPIE, vol. 12053, no. 1, May 2022, pp. 1205314-1205314–14. EBSCOhost, https://doi.org/10.1117/12.2607571.

APA

Robinson, J. C., Sendelbach, M. J., Groeger, P., Denker, U., Zech, R., Buhl, S., Ruhm, M., Kim, M., Jang, H., Kang, C., Lee, D., Kim, H., Park, S., Kim, B., Lee, H., Lee, S., Choi, D., & Lee, J. (2022). Advanced CD uniformity correction using radial basis function (RBF) models. Proceedings of SPIE, 12053(1), 1205314-1205314–14. https://doi.org/10.1117/12.2607571

Chicago

Robinson, John C., Matthew J. Sendelbach, Philip Groeger, Ulrich Denker, Robin Zech, Stefan Buhl, Matthias Ruhm, et al. 2022. “Advanced CD Uniformity Correction Using Radial Basis Function (RBF) Models.” Proceedings of SPIE 12053 (1): 1205314-1205314–14. doi:10.1117/12.2607571.