CARBonCHIP: Carbon Nanotubes Technology on Silicon Integrated Circuits; Some Key Results

CARBonCHIP ("Carbon Nanotubes Technology on Silicon Integrated Circuits") has been a three year EU FP6 STReP collaborative project aimed to determine whether carbon nanotubes are a viable material to be used in the manufacture of interconnected transistors for future electronic devices beyond the 22 nm node. The research activities performed within the CARBonCHIP consortium primarily focused on the back end of line leading to the ability to now selectively grow dense bundles of vertical CNTs (10E12 CNTs cm-2) inside small diameter vias (140 nm) with repeatable yield. The final project deliverable, summarised in this paper, has been the generation of a materials based roadmap indicating further development of CNTs as a viable building block in nanoelectronics IC devices to extend Moore's Law beyond the year 2020. As this is a public report, only information which has been published or disseminated at a public level is being documented.