YSZ Free-standing Membranes for Silicon-based Micro SOFCs

The present study is devoted to analyze the compatibility of yttria-stabilized zirconia thin films prepared by pulsed laser deposition technique for developing new silicon-based micro devices for micro solid oxide fuel cells applications. Yttria-stabilized zirconia free-standing membranes with thicknesses from 60 to 240 nm and surface areas between 50x50 µm2 and 820x820 µm2 were fabricated on micromachined Si/SiO2/Si3N4 substrates. Deposition process was optimized for deposition temperatures from 200ºC to 800ºC. A mechanical study comprising thermomechanical stability, residual stress of the membranes and annealing treatment as well as a preliminary electrical characterization of ionic conductivity was performed in order to evaluate the best processing parameters for the yttria-stabilized zirconia membranes.