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Characterization and Modeling of the Electrical Behavior and Threshold Voltage of the Nanocrystalline GZO Delta-doped ZnO TFTs

Authors :
Hsiao, Shih-Hua
Liu, Kuang Chung
Chiang, Hung-Li
Su, Liang Yu
Peng, Lung Han
Huang, JianJang
Source :
ECS Transactions; September 2009, Vol. 25 Issue: 3
Publication Year :
2009

Abstract

A ZnO TFT with high operating current and adjustable threshold voltage is demonstrated by inserting a thin GZO layer within the ZnO layer. The TFTs of the proposed structure are fabricated, and the conventional TFTs are fabricated for comparison. The threshold voltage model of this TFT considering the device structure and the nanocrystalline property is developed and verified with the experimental results.

Details

Language :
English
ISSN :
19385862 and 19386737
Volume :
25
Issue :
3
Database :
Supplemental Index
Journal :
ECS Transactions
Publication Type :
Periodical
Accession number :
ejs61749988
Full Text :
https://doi.org/10.1149/1.3204416