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Effect of Nitrogen Doping on Variability of TaOx-RRAM for Low-Power 3-Bit MLC Applications

Authors :
Misha, Saiful Haque
Tamanna, Nusrat
Woo, Jiyong
Lee, Sangheon
Song, Jeonghwan
Park, Jaesung
Lim, Seokjae
Park, Jaehyuk
Hwang, Hyunsang
Source :
ECS Solid State Letters; January 2015, Vol. 4 Issue: 3
Publication Year :
2015

Abstract

The switching uniformity and reliability of the TaOxbased resistive random access memory (RRAM) device were investigated with varying nitrogen doping concentration. The nitrogen doped samples shows excellent electrical and reliability characteristics such as small switching variability for 3-bit multilevel per cell (MLC), low power operation and good retention properties. Compared with control sample, improved device characteristics of nitrogen doped device can be explained by nitrogen induced filament confinement.

Details

Language :
English
ISSN :
21628742 and 21628750
Volume :
4
Issue :
3
Database :
Supplemental Index
Journal :
ECS Solid State Letters
Publication Type :
Periodical
Accession number :
ejs61798942
Full Text :
https://doi.org/10.1149/2.0011504ssl