Back to Search
Start Over
Surface topography reconstruction method based on modulation of white light interference signal
- Source :
- Proceedings of SPIE; November 2023, Vol. 12921 Issue: 1 p129214H-129214H-10, 12792197p
- Publication Year :
- 2023
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12921
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs64483365
- Full Text :
- https://doi.org/10.1117/12.2691822