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Coupled Shear SAW Resonator With High Electromechanical Coupling Coefficient of 34% Using X-Cut LiNbO₃-on-SiC Substrate
- Source :
- IEEE Electron Device Letters; 2024, Vol. 45 Issue: 4 p720-723, 4p
- Publication Year :
- 2024
-
Abstract
- In this work, a coupled shear mode surface acoustic wave (CS-SAW) resonator has been proposed and demonstrated for the first time, which utilizes both <inline-formula> <tex-math notation="LaTeX">${e}_{{16}}$ </tex-math></inline-formula> and <inline-formula> <tex-math notation="LaTeX">${e}_{{34}}$ </tex-math></inline-formula> for piezoelectric excitation and achieves exceedingly high electromechanical coupling coefficient (<inline-formula> <tex-math notation="LaTeX">${k}^{{2}}{)}$ </tex-math></inline-formula> of 34% at 5 GHz based on a LiNbO3-on-SiC (LNoSiC) substrate. By properly selecting the three-dimensional (3D) Euler angle (<inline-formula> <tex-math notation="LaTeX">$\alpha {)}$ </tex-math></inline-formula> and designing the thickness (<inline-formula> <tex-math notation="LaTeX">${h}_{\text {LN}}{)}$ </tex-math></inline-formula> to wavelength (<inline-formula> <tex-math notation="LaTeX">$\lambda {)}$ </tex-math></inline-formula> ratio of the LiNbO3 thin film, two piezoelectric coefficients (<inline-formula> <tex-math notation="LaTeX">${e}_{{16}}$ </tex-math></inline-formula> and <inline-formula> <tex-math notation="LaTeX">${e}_{{34}}{)}$ </tex-math></inline-formula> can be coherently coupled together in one single vibration pattern, so that the electromechanical coupling <inline-formula> <tex-math notation="LaTeX">${k}^{{2}}$ </tex-math></inline-formula> add up. When the Euler angle approaches 0°, the CS-SAW resonator operating at 5 GHz exhibits a high <inline-formula> <tex-math notation="LaTeX">${k}^{{2}}$ </tex-math></inline-formula> of 34% and an excellent figure of merit (FoM = <inline-formula> <tex-math notation="LaTeX">${k}^{{2}} \cdot ~{Q}_{\text {max}}{)}$ </tex-math></inline-formula> of 221, which are both the highest among all reported high frequency SAW resonators near or above 5 GHz. This demonstration not only greatly enhances the bandwidth of SAW filters at high frequencies, but also opens up a groundbreaking way of designing new and more complex coupled modes for a variety of applications.
Details
- Language :
- English
- ISSN :
- 07413106 and 15580563
- Volume :
- 45
- Issue :
- 4
- Database :
- Supplemental Index
- Journal :
- IEEE Electron Device Letters
- Publication Type :
- Periodical
- Accession number :
- ejs65983406
- Full Text :
- https://doi.org/10.1109/LED.2024.3368426